Tam sim no tus txheej xwm thiab kub pob ntawm optical processing tshuab nyob rau hauv Suav teb

Tam sim no, qee cov tuam txhab uas txais ib qho ntau yam thiab muaj coob tus cov khoom lag luam txawv teb chaws tsis muaj peev xwm tiv thaiv tau qhov teeb meem ntawm lub thoob ntiaj teb nyiaj txiag. Cov tuam txhab sib txuas tiaj khov kho yuav tsum kho cov qauv tsim, nrhiav cov tshiab thiab ntau hom ntau yam, thiab txhawb kev tsim khoom kom muaj zog dua tshiab. Lub ntsej muag nrog rau qhov teeb meem no, yuav ua li cas thiaj li suav tau cov xov xwm kev lag luam ntawm cov kev lag luam dhau los? Dab tsi yog qhov tseem ceeb tshaj plaws rau kev lag luam? Kuv xav tias peb yuav tsum txeeb cov haujlwm kub ntxhov, txeeb cov haujlwm kub ntxhov, thiab tuav kom muaj kev nyuab siab thiab tsom ntsoov rau kev sib tw kom nrhiav kev tsim tshiab hauv kev lag luam tshiab.

Yog li, dab tsi yog qhov chaw kub ntawm kev kho qhov muag nyob hauv Suav teb? Kuv lub tswv yim yog plaub lo lus: me, loj, nyuaj, zoo.

1 "me" - cov yam ntxwv me me qhov muag

Micro-optic lub cev muaj xws li cov iav me me, cov iav me me (iav thiab yas), microprisms, micro-planar thiab lens array daim hlau, cov khoom ntim khoom muaj nqis, thiab cov zoo li.

Nyob rau hauv xyoo tas los, cov ntaub ntawv xov xwm ntawm optoelectronic tau tsim sai heev, thiab IT kev lag luam tau sai emerged. Qhov kev thov rau digital koob yees duab, projectors, digital scanners, kho qhov muag optical Cheebtsam thiab lwm yam khoom muaj maj ntxiv, thiab cov qauv ntawm cov qauv rau miniaturization tau ua ib tug lossis loj tshiab kev lag luam- - Kev lag luam micro-optics.

Cov khoom tsim thiab software ntawm Tuam Tshoj lub optoelectronic ntaub ntawv kev lag luam tsis deb tom qab thoob ntiaj teb. Qhov sib txawv yog ntau dua ntawm cov ntaub ntawv, kev ua haujlwm, thiab kev tsim khoom. Peb yuav tsum ua kom cov peev txheej nce ntxiv rau hauv peb cheeb tsam los ua cov kev tshawb fawb tseem ceeb. Ntawm lawv, lub lenslet hem machining txheej txheem thiab lub imaging yas aspheric lens txhaj molding txheej txheem yuav tsum yog qhov tseem ceeb.

1.1 Lens thiab cov txheej txheem machining

Lens thiab nruab nrab kheej kheej lo ntsiab muag feem ntau siv quasi-spherical center sib tsoo thiab polishing, uas yog, polishing ib ncig ntawm lub chaw nruab nrab ntawm tus kheej. Los ntawm kev ntsuas, cov cuab yeej technology no muaj qhov tshwm sim ntawm kev sib luag tsis sib xws thiab tsis ua haujlwm zoo. Tus me-kheej hem tshuab ua yog qhov tseem ceeb ib zaug xwb-nti ua tiav qhov kev sib tsoo thiab txoj cai txav rau ntawm qhov chaw nruab nrab ntawm pob. Tus ua yog siab tshaj qhov siab, tus ua ceev yog ceev, thiab qhov zoo tshaj plaws yog qhov ruaj ntseg zoo.

Cov ncej sab qaum ntawm qhov kev sib tshuam sab nraud tsuas yog tsiv nqes, nqis nraub qaum sab nraub qaum ntawm sab qis thiab sab qis, yog li kom ntseeg tau tias qhov qis dua yuav ncav tes nrog qhov tseeb ntawm 0.01 hli, uas tsis hloov nrog lub lens nto. Thaum lub sij hawm ua, lub thickness ntawm lub lens tau nyeem los ntawm lub ntsuas qhov hu nrog ib qho tseeb ntawm ± 0.01 hli. Siv lub tshuab lub nplhaib rau kev zom thiab txhuam ib sab ntawm 7 hli lens, tus ua haujlwm ceev yog ceev dua li ntawm qhov loj thaum nws siv li 2 min.

1.2 Txhaj Tshuaj Txhaj Txheem Txheej Txheem Kev Tuaj Saib Kev Nyuaj Rau Cov Khaub Noom Yas

Kev tsim cov txheej txheem ntawm cov yas aspherical txhaj tshuaj molding siv rau teeb pom kev thiab tsom teeb nyob rau hauv Suav teb kuj yog raug. Tseem muaj ntau lub pob zeb diamond lathes siv los ua cores. Tib lub sij hawm, qhov kev thov rau cov yas hniav yas kheej kuj nce ntxiv, xws li cov koob yees duab digital thiab cov koob yees duab. Yas tshuaj aspheric lo ntsiab muag rau cov iav tsom iav. Txawm li cas los, tam sim no, qhov zoo ntawm cov yas uas tsis yog xim aspheric tsis dhau los ntawm ntau ntau. Ntev li peb ua tib zoo kawm txog kev txhawj xeeb ntawm kev txhawj xeeb, xws li British Formtalysurf profiler, US subaperture interferometer thiab zonal interferometer, qhov txheej txheem no yog ib qho kev cuam tshuam.

2 "Loj" - dav hlau dav hlau, loj lo ntsiab muag, thiab cov iav loj loj

TV LCD los yog plasma npo, "Shenguang III", lub koob yees duab lub koob yees duab, qhov chaw yees duab, photolithography lens, ntau qhov chaw multi-objective fiber-optical spectrum astronomical telescope (LAMOST) thiab 20m self-adaptive optical astronomical telescope uas tau tsim nyob rau hauv lub neej yav tom ntej Muaj ntau ntau lub siab loj dav hlau dav hlau thiab loj tsom iav.

Rau cov cheeb tsam no, ntau chav nyob hauv Suav teb tau nthuav dav dav dav hlau, kheej kheej thiab tshuab kheej kheej hauv CNC. Piv txwv li, Nanjing Astronomical Instrument Research Center tau qhia txog Teb Chaws Asmeskas 3.2 m nplhaib cuam tshuam; Chengdu Precision Optical Engineering Center tau tshaj tawm Russia 500 lub dav hlau diamond fly-txiav thiab milling cov cav tov thiab ntau yam peb-axis, plaub-axis, thiab tsib-axis CNC optical polishing tshuab; Lub Nruab Nrab Nruab Nrab Ultra Precision Manufacturing Centre yog qhia txog 400 hli ultra-precision machining thiab soj ntsuam cov dav hlau optical, txhua yam thiab cov khoom qub, tag nrho cov khoom uas tsim nyog rau kev tsim cov khoom loj kho qhov loj.

Tsis tas li ntawd, txoj kev loj hlob ntawm cov dav hlau loj, lub tshuab kheej kheej kheej kheej kheej kheej thiab cov tshuab ciaj ciam hlau tau siv kuj tau ua tiav hauv Suav teb. Piv txwv li, 4 m dhia ceev faj CNC nplhaib polisher tsim los ntawm Nanjing Lisheng Optomechanics Co., Ltd. yog tam sim no tus pej thuam polishing hauv Suav; HIT tsim tau 600 hli siv lead ua superfine diamond fly-dav hlau milling tshuab thiab 600 mm aspheric super xov tshuab cav. Aerospace 303 tau tsim cov Nanosys 300 tshuab hauv tshuab raj; Northelg tau tsim cov PPS 100 high-precision planar optics zauv tswj ceev polishing tshuab. Nws yog tsim nyog hais tias lub National Institute of Defense Science thiab Technology lub tsev xub thawj 500 hli ion beam ua khoom kuj tau ua rau kev vam meej nyob rau hauv kev loj hlob ntawm ultra-precision large-scale optical qhov chaw raug mob. Txoj kev loj hlob ntawm cov khoom loj loj loj thiab qhov muag kho qhov muag lossis cov iav khom qhov muag nyob hauv Suav teb tau ua tiav hauv tuam tsev kawm thiab cov tebchaws. Chengdu Precision Optical Engineering Center, Changchun lub koom haum Optics, Chengdu Optoelectronics lub koom haum, Shanghai Lub Tsev Kawm Ntawv ntawm Optics thiab Electronics, 45th Institutes of Electronic Industry, Nanjing Astronomical Instrument Development Center, National University of Defense Technology, Suzhou University, thiab University of Zhejiang.

Txawm li cas los, Tuam Tshoj tus niaj hnub ua qhov loj tshaj plaws kho qhov muag, qhov tsom iav thiab optical lenses tseem ua tsis tau raws li qhov xav tau. Piv txwv, lub koob yees duab chaw siv nyob rau hauv "God Five" manned satellite siv lub Lavxias teb sab silicon carbide iav. Tsis tas li ntawd, Tuam Tshoj lub lithography lens tsis tau mus txog theem thoob ntiaj teb, thiab nws tseem xav tau ib qhov peev txheej loj.

3 "Nyuaj" - tawv hnyav cua tawv

Silicon carbide (SiC) muaj ib qho kev nyuaj siab ntawm Mohs 9.5, ib qho uas tsawg tsawg, thiab tsis muaj kev sib ntxub ntawm kev nthuav dav. Nws yog ib qho siv xauv qhwv hauv isotropic hexagonal thiab yog ib qho khoom siv dav hlau aerospace. Sapphire / ruby (Al2O3) muaj ib qho kev nyuaj siab ntawm Mohs 9, uas yog ib qho siv anthotropic hexagonal Crystal thiab yog ib qho khoom siv kho qhov muag zoo. Ruby yog ib yam khoom siv laser luminescent, sapphire thiab ruby cov ntaub ntawv infrared qhov rai, thiab sapphire kuj yog ib qho khoom zoo substrate. Sapphire's high refractive index, highness hardness, muaj yeeb yuj, tab sis kuj tseem ceeb decorations thiab "tsis txhob hnav" cov ntaub ntawv qib siab. Yttrium-doped yttrium aluminium garnet (YAG) muaj ib qho kev nyuab siab ntawm Mohs ntawm 8 mus rau 8.5 thiab yog ib qho khoom siv laser sab hauv. Lub quartz Crystal (SiO2) muaj ib tug Mohs hardness ntawm 7, uas yog ib qho anisotropic hexagonal Crystal thiab yog ib tug zoo-kho khoom siv nyob rau hauv ultraviolet thiab infrared liaj teb. Tam sim no qhov nrov tshaj plaws yog kev kho qhov muag ntawm silicon carbide thiab liab thiab sapphire.

Melting, kev hloov kho deg thiab kho qhov muag ntawm cov ntaub ntawv SiO2 tseem nyob hauv kev tsim kho thiab tshawb nrhiav theem hauv Suav teb. Kev tshawb fawb ntawm txoj kev tshawb fawb ntawm Silicate tshawb fawb ntawm Shanghai, Xi'an Opto-Mechanics Institute, Shanghai lub koom haum ntawm Technology thiab Nanjing Astronomical Optical Technology Lub Koom Txoos tau ua kev zoo siab. Tam sim no, Tuam Tshoj tau tsim ib qho SiO2 imaging aspherical iav nrog tawm qhov kab uas hla ntawm 520 hli, nrog rau cov kab xo ntawm 800 mm.

Sapphire muaj lub siab tawv, ib txoj kev ua tshwj xeeb, thiab ntau nrhau hauv tus txheej txheem, nrog rau kev nplua zoo. Abrasives thiab polishing cov ntaub ntawv yuav siv nrog cov pob zeb diamond los yog pob zeb diamond hmoov, nrog qhov ntau thiab tsawg ntawm w1, w0.5, w0.25, thiab ntau tshaj; diamonds kuj tseem siv tau los txhuam cov tawv nqaij. Cov pwm polishing pwm tuaj yeem yog hlau ntoo, pob zeb diamond pwm, tooj liab pwm los yog ib lub pov haum gemstone. Tsis tas li ntawd, SiO2 tshuaj txhuam cov tshuaj siv dej kuj tuaj yeem ua tiav cov txiaj ntsig zoo.

4 "zoo" - zoo zoo lens lossis optical caij

4.1 Super-zoo kho qhov muag deg

Qhov yuav tsum tau ua rau cov duab zoo li ntawm qhov chaw ntom nti thiab qhov roughness ntawm qhov chaw kho qhov muag zoo dua thiab siab dua, thiab optical lo ntsiab muag (UV lithography lo ntsiab muag, thiab lwm yam) kuj yuav tsum tau muaj ze-diffraction-txwv kev zoo saib, tag nrho cov uas tau txais kev cuam tshuam tus nab npawb tshiab ua cov txheej txheem hauv superfinishing. Cov kev qhia muaj xws li: Computer Numerical Control Gadget Optical Surface Processing (CCOS), Tshuab Magnetorheological Polishing (MRF), thiab IBF (Ion Beam Polishing) technology. Nyob rau hauv 1980s, Suav teb pib kawm CCOS, thiab tam sim no nws cov tshuab tau loj hlob; nyob rau xyoo 1990, Suav teb pib kawm MRF technology, thiab tau ua tiav zoo. Nyob rau hauv xyoo tas los, QED Technologies ntawm Teb Chaws Asmeskas tau pib muab cov cuab yeej technology thiab cov cuab yeej MRF. Nyob rau tib lub sijhawm, National University of Defense Technology kuj siv IBF cov cuab yeej siv los kho qhov kho qhov muag nrog cov roughness ntawm 1 nm.

Cov nthwv dej ntws interferometer yog lub ntsiab ntsuas kom pom qhov tseeb ntawm qhov profile saum toj. Nyob rau hauv 1985, Tuam Tshoj ua tiav txoj kev loj hlob ntawm thawj tsab ntawv. Nyob rau hauv xyoo tas los no, Nanjing University of Science thiab Technology tau tsim ib lub tshuab hlwb hlau me me, uas yog tus nqi qis, yooj yim siv, thiab muaj kev lag luam siab. Lawv nyuam qhuav tsim ib qho infrared interferometer nrog tawm qhov kab ntawm 600 hli rau Shenguang III. Hauv qhov kev ntsuas ntawm daim tawv nqaij ntawm daim tawv nqaij, subaperture interferometry thiab zoning txoj kev tau tawm tswv yim txawv teb chaws, thiab cov dav hlau ncaj qha, ntsuas tau ncaj qha nrog ib qho interferometer.

4.2 Ultra-precision optical lens super-precision tshuab

Ultra-precision optical mounting yog ib qho tseem ceeb tshaj plaws lav rau kev ua kom zoo nkauj ntawm cov khoom muag khib nyiab zoo nkaus xwb. Ultra-precision chaw tshwj xeeb ntsug tshuab dhos yog tus yuam sij rau ultra-precision optical mounting.

Cov khoom siv nyob rau hauv Suav teb yog qhov tseem ceeb ntawm qhov ntsuas ntawm 500 mm los ntawm Chengdu Optoelectronics. Lub spindle ntawm ntsuas yog ib tug super-precision kev coj tus qauv nrog ib tug radial runout thiab axial runout ntawm 1 μm. Tam sim no lub radial runout ntawm cov bearings hydrostatic nyob rau hauv lub nruab centering tshuab sia mus thoob ntiajteb tau mus txog 0.1μm, thiab radial runout ntawm cov huab cua bearings tau mus txog 0.05μm.

Ultra-precision optical mounting yog raws li lub tshuab tshuab twjpawb. Tag nrho cov lens lub chaw ntawm lub ntiajteb txawj coj mus kis ntawm lub nias ntawm lub cuab yeej cuab tam, yog li ntawd kom ua tiav ultra-precision tsev kawm ntawv raws li cov axis kho qhov muag. Nws kuj yuav tau kho raws li lub lens duab xav tau thaum txheej txheem installation. Ultra-fine lo ntsiab muag yog qhov siab tshaj plaws rau kev kho qhov muag lo ntsiab muag. Cov qauv piv txwv yog UV lithography lo ntsiab muag, teeb nruab nrab ntawm cov teeb meem, lub lauj kaub rau lub tsom iav, thiab lub koob yees duab kos duab.

Tsis ntev los no 193 nm ultra-ultraviolet photoetching lens hauv peb lub teb chaws tau coj teeb meem loj rau optical tsim, kho qhov muag thiab optical mounting. Raws li qhov kev kwv yees ua ntej, yog tias muaj ntau tshaj 30 lo ntsiab muag yuav tsum tau ua kom tiav cov kev tsim cov qauv rau lub lens, cov ntaub ntawv kho qhov muag siv tau yooj yim quartz iav thiab mos CaF2 cov nplaum. Obviously, qhov saum npoo ntawm cov khoom no yuav tsum yog ultra-tus, super-precision saum npoo, ua yog nyuaj heev, thiab kho qhov muag mounting tseem self-evident. Lub tswv yim tseem ceeb ntawm niaj hnub kho qhov muag twj paj nruag ntawm Zhejiang University tau tsim ib lub tswv yim loj lithography lub hom phiaj lens ob peb xyoos dhau los. Nws cov specifications muaj raws li nram no: aperture inch 280 mm, naj npawb aperture NA 0.08, raug wavelength 365 nm, qhov tob ntawm daim teb 0.25 μm, Cov kab ntawm pom yog 203.2 hli nrog ib rooj ntawm 2.5 μm los yog tsawg dua (theoretical txwv). No hom ultra-high-precision lub hom phiaj lens manufacturing tshuab kuj yog qhov kub qhov teeb meem hauv kev lag luam optoelectronic.

5 Xaus lus nrog

Nyob rau hauv teb rau lub thoob ntiaj teb nyiaj txiag teeb meem, Tuam Tshoj tus xov tooj optoelectronic ntaub ntawv yuav tsum kho nws cov qauv kev lag luam, kub siab txog cov teeb meem kev siv tshuab kho qhov muag, thiab muab cov teeb meem ntawm lub tuam txhab, xaiv kev txhawb zog ntawm plaub qhov ntev ntawm "me, loj, nyuaj , thiab ua kom zoo zoo "thiab ua kom tau cov nyom tshiab ntawm GDP. Qhov kev loj hlob ntawm txoj kev lag luam minimizes tus tsis zoo ntawm lub thoob ntiaj teb nyiaj txiag teebmeem.

Hais txog tus sau: Cao Tianning, xib fwb ntawm Optoelectronics Department ntawm Zhejiang University, kho thawj zaug kho qhov muag technology hauv Suav. Nws yog thawj tus tau txais qhov kho qhov muag pom kev tawm ntawm cov nplhaib thrower, cov nthwv dej ntws interferometer thiab lub computer cov cuab yeej tswj kav hauv Suav teb. Nws yog lub tshuab fais fab zoo nkauj thiab kev soj ntsuam hauv Suav teb. kws tshaj lij.